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ISO 3530:1979

Current Revision

Vacuum technology -- Mass-spectrometer-type leak-detector calibration

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Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.


SDO ISO: International Organization for Standardization
Document Number ISO 3530
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO TC 112/SC 2
Publish Date Document Id Type View
Not Available ISO 3530:1979 Revision