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ISO 25178-603:2013

Current Revision

Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

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ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.


SDO ISO: International Organization for Standardization
Document Number ISO 25178
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 213
Publish Date Document Id Type View
Not Available ISO 25178-603:2013 Revision