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ISO 21360-6:2023

Current Revision

Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 6: Cryogenic vacuum pumps

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This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps.

It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.


SDO ISO: International Organization for Standardization
Document Number ISO 21360
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 112
Publish Date Document Id Type View
Not Available ISO 21360-6:2023 Revision