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ISO 20146:2019

Current Revision

Vacuum technology - Vacuum gauges - Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

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This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.


SDO ISO: International Organization for Standardization
Document Number ISO 20146
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 112
Publish Date Document Id Type View
Not Available ISO 20146:2019 Revision