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ISO 14644-2:2015

Current Revision

Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration

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ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.


SDO ISO: International Organization for Standardization
Document Number ISO 14644
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 209
Publish Date Document Id Type View
Not Available ISO 14644-2:2015 Revision