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ISO 14644-15:2017

Current Revision

Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration

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ISO 14644-15:2017 provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644‑8).

The following are outside the scope of ISO 14644-15:2017:

- health and safety requirements;

- compatibility with cleaning agents and techniques;

- cleanability;

- biocontamination;

- specific requirements of equipment and materials for processes and products;

- design details of equipment.


SDO ISO: International Organization for Standardization
Document Number ISO 14644
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 209
Publish Date Document Id Type View
Not Available ISO 14644-15:2017 Revision