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ISO/TS 22933:2022

Current Revision

Surface chemical analysis - Secondary ion mass spectrometry - Method for the measurement of mass resolution in SIMS

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This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.


SDO ISO: International Organization for Standardization
Document Number ISO/TS 22933
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 6
Publish Date Document Id Type View
Not Available ISO/TS 22933:2022 Revision