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IEEE 62659-2015

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IEC/IEEE International Standard - Nanomanufacturing -- Large scale manufacturing for nanoelectronics

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This International Standard provides a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.). Since semiconductor manufacturing facilities need to incorporate practices that maintain high yields, there are very strict requirements for how manufacturing is performed. Nanomaterials represent a potential contaminant in semiconductor manufacturing facilities and need to be introduced in a structured and methodical way. This International Standard provides steps employed to facilitate the introduction of nanomaterials into the semiconductor manufacturing facilities. This sequence is described below under the areas of raw materials acquisition, materials processing, design, IC fabrication, testing, and end-use. These activities represent the major stages of the supply chain in semiconductor manufacturing facilities.
[Since this document is being developed jointly with IEC, there will be no purpose clause (in accordance with IEC style).]

SDO IEEE: Institute of Electrical and Electronics Engineers
Document Number 62659
Publication Date Sept. 30, 2015
Language en - English
Page Count 16
Revision Level
Supercedes
Committee Standards Committee
Publish Date Document Id Type View
Sept. 30, 2015 62659-2015 Revision