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BSI BS ISO 14644-12:2018

Current Revision

Cleanrooms and associated controlled environments. Specifications for monitoring air cleanliness by nanoscale particle concentration

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Specifications for monitoring air cleanliness by nanoscale particle concentration

SDO BSI: British Standards Institution
Document Number BS ISO 14644-12
Publication Date Sept. 6, 2018
Language en - English
Page Count 20
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Sept. 6, 2018 BS ISO 14644-12:2018 Revision