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BSI BS IEC 62047-30:2017

Current Revision

Semiconductor devices. Micro-electromechanical devices. Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film

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Measurement methods of electro-mechanical conversion charact

SDO BSI: British Standards Institution
Document Number BS IEC 62047-30
Publication Date Oct. 9, 2017
Language en - English
Page Count 22
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Oct. 9, 2017 BS IEC 62047-30:2017 Revision