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BSI BS EN ISO 14644-9:2012

Historical Revision

Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration

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Cleanrooms and associated controlled environments. Classification of surface cleanliness by particle concentration

SDO BSI: British Standards Institution
Document Number BS EN ISO 14644
Publication Date Aug. 31, 2012
Language en - English
Page Count 36
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
July 8, 2022 BS EN ISO 14644-9:2022 Revision
Aug. 31, 2012 BS EN ISO 14644-9:2012 Revision