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BSI BS EN ISO 14644-10:2013

Historical Revision

Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration

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Cleanrooms and associated controlled environments. Classification of surface cleanliness by chemical concentration

SDO BSI: British Standards Institution
Document Number BS EN ISO 14644
Publication Date April 30, 2013
Language en - English
Page Count 40
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
July 13, 2022 BS EN ISO 14644-10:2022 Revision
April 30, 2013 BS EN ISO 14644-10:2013 Revision