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BSI BS EN 62047-6:2010

Current Revision

Semiconductor devices. Micro-electromechanical devices. Axial fatigue testing methods of thin film materials

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Part 6: Axial fatigue testing methods of thin film materials

SDO BSI: British Standards Institution
Document Number BS EN 62047-6
Publication Date April 30, 2010
Language en - English
Page Count 20
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
April 30, 2010 BS EN 62047-6:2010 Revision