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BSI BS EN 62047-21:2014

Current Revision

Semiconductor devices. Micro-electromechanical devices. Test method for Poisson's ratio of thin film MEMS materials

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Test method for Poisson's ratio of thin film MEMS materials

SDO BSI: British Standards Institution
Document Number BS EN 62047-21
Publication Date Oct. 31, 2014
Language en - English
Page Count 18
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Oct. 31, 2014 BS EN 62047-21:2014 Revision