Logo

BSI BS EN 62047-16:2015

Current Revision

Semiconductor devices. Micro-electromechanical devices. Test methods for determining residual stresses of MEMS films. Wafer curvature and cantilever beam deflection methods

$169.00

$169.00

$304.20


Sub Total (1 Item(s))

$ 0.00

Estimated Shipping

$ 0.00

Total (Pre-Tax)

$ 0.00


Document Preview Not Available...

Wafer curvature and cantilever beam deflection methods

SDO BSI: British Standards Institution
Document Number BS EN 62047-16
Publication Date July 31, 2015
Language en - English
Page Count 18
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
July 31, 2015 BS EN 62047-16:2015 Revision