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BSI BS EN 62047-13:2012

Current Revision

Semiconductor devices. Micro-electromechanical devices. Bend-and shear-type test methods of measuring adhesive strength for MEMS structures

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methods of measuring adhesive strength for MEMS structures

SDO BSI: British Standards Institution
Document Number BS EN 62047-13
Publication Date May 31, 2012
Language en - English
Page Count 18
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
May 31, 2012 BS EN 62047-13:2012 Revision