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BSI BS EN 62047-11:2013

Current Revision

Semiconductor devices. Micro-electromechanical devices. Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

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of linear thermal expansion of free-standing materials for m

SDO BSI: British Standards Institution
Document Number BS EN 62047-11
Publication Date Oct. 31, 2013
Language en - English
Page Count 24
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Oct. 31, 2013 BS EN 62047-11:2013 Revision