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BSI BS EN 62047-1:2016

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Semiconductor devices. Micro-electromechanical devices. Terms and definitions

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Semiconductor devices. Micro-electromechanical devices. Term

SDO BSI: British Standards Institution
Document Number BS EN 62047-1
Publication Date April 30, 2016
Language en - English
Page Count 36
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
April 30, 2016 BS EN 62047-1:2016 Revision
Sept. 29, 2006 BS EN 62047-1:2006 Revision