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ASTM F24-04

Historical Revision

Standard Method for Measuring and Counting Particulate Contamination on Surfaces

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1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.

Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.


This test method establishes the standard procedures for measuring and quantizing the size distribution of particulate contamination either on, or washed from, the surface of small electron-device components. The apparatus and reagents required for this test are also enumerated herein. The number of required test specimens is governed by the dimensions of the component or surface being analyzed. Results shall be interpreted as particles per component or particles per square centimetre of component surface.


SDO ASTM: ASTM International
Document Number F24
Publication Date Sept. 1, 2004
Language en - English
Page Count 4
Revision Level 04
Supercedes
Committee E21.05
Publish Date Document Id Type View
April 1, 2020 F0024-20 Revision
April 1, 2009 F0024-09 Revision
Sept. 1, 2004 F0024-04 Revision
May 10, 2000 F0024-00 Revision
Oct. 1, 2015 F0024-09R15 Reaffirmation