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ASTM F24-00

Historical Revision

Standard Method for Measuring and Counting Particulate Contamination on Surfaces

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1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.

Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.


SDO ASTM: ASTM International
Document Number F24
Publication Date May 10, 2000
Language en - English
Page Count 4
Revision Level 00
Supercedes
Committee E21.05
Publish Date Document Id Type View
April 1, 2020 F0024-20 Revision
April 1, 2009 F0024-09 Revision
Sept. 1, 2004 F0024-04 Revision
May 10, 2000 F0024-00 Revision
Oct. 1, 2015 F0024-09R15 Reaffirmation