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ASTM F1709-97

Historical Revision

Standard Specification for High Purity Titanium Sputtering Targets for Electronic Thin Film Applications (Withdrawn 2023)

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1.1 This specification covers pure titanium sputtering targets used as a raw material in fabricating semiconductor electronic devices.

1.2 This standard sets purity grade levels, physical attributes, analytical methods, and packaging.


SDO ASTM: ASTM International
Document Number F1709
Publication Date Jan. 1, 1996
Language en - English
Page Count 3
Revision Level 97
Supercedes
Committee F01.17
Publish Date Document Id Type View
May 1, 2016 F1709-97R16 Revision
Jan. 1, 1996 F1709-97 Revision
June 15, 2008 F1709-97R08 Reaffirmation
Dec. 10, 2002 F1709-97R02 Reaffirmation