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ASTM F154-02

Current Revision

Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)

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This standard was transferred to SEMI (www.semi.org) May 2003

1.1 The purpose of this guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Recommended practices for delineation and observation of these artifacts are referenced. The artifacts described in this guide are intended to parallel and support the content of the SEMI M18. These artifacts and common synonyms are arranged alphabetically in Tables 1 and 2 and illustrated in Figs. 1-68 .


SDO ASTM: ASTM International
Document Number F154
Publication Date Jan. 10, 2001
Language en - English
Page Count 13
Revision Level 02
Supercedes
Committee F01.06
Publish Date Document Id Type View
Jan. 10, 2001 F0154-02 Revision
Jan. 10, 2001 F0154-00 Revision