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ASTM E995-04

Historical Revision

Standard Guide for Background Subtraction Techniques in Auger Electron Spectroscopy and X-Ray Photoelectron Spectroscopy (Withdrawn 2025)

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1.1 The purpose of this guide is to familiarize the analyst with the principal background subtraction techniques presently in use together with the nature of their application to data acquisition and manipulation.

1.2 This guide is intended to apply to background subtraction in electron, X-ray, and ion-excited Auger electron spectroscopy (AES), and X-ray photoelectron spectroscopy (XPS).

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


Background subtraction techniques in AES were originally employed as a method of enhancement of the relatively weak Auger signals to distinguish them from the slowly varying background of secondary and backscattered electrons. Interest in obtaining useful information from the Auger peak line shape, concern for greater quantitative accuracy from Auger spectra, and improvements in data gathering techniques, have led to the development of various background subtraction techniques.

Similarly, the use of background subtraction techniques in XPS has evolved mainly from the interest in the determination of chemical states (binding energy values), greater quantitative accuracy from the XPS spectra, and improvements in data acquisition. Post-acquisition background subtraction is normally applied to XPS data.

The procedures outlined are popular in XPS and AES. General reviews of background subtraction techniques have been published (1 and 2 ).3

SDO ASTM: ASTM International
Document Number E995
Publication Date July 1, 2004
Language en - English
Page Count 4
Revision Level 04
Supercedes
Committee E42.03
Publish Date Document Id Type View
Nov. 1, 2016 E0995-16 Revision
Oct. 15, 2011 E0995-11 Revision
July 1, 2004 E0995-04 Revision
Feb. 10, 1997 E0995-97 Revision