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ASTM E983-10

Historical Revision

Standard Guide for Minimizing Unwanted Electron Beam Effects in Auger Electron Spectroscopy

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1.1 This guide outlines the origins and manifestations of unwanted electron beam effects in Auger electron spectroscopy (AES).

1.2 Some general guidelines are provided concerning the electron beam parameters which are most likely to produce these effects and suggestions are offered on how to minimize them.

1.3 General classes of materials are identified which are most likely to exhibit unwanted electron beam effects. In addition, a tabulation of some specific materials which have been observed to undergo electron damage effects is provided.

1.4 A simple method is outlined for establishing the existence and extent of these effects during routine AES analysis.

1.5 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

When electron beam excitation is used in AES, the incident electron beam can interact with the specimen material causing physical and chemical changes. In general, these effects are a hindrance to AES analysis because they cause localized specimen modification (1-4).

With specimens that have poor electrical conductivity the electron beam can stimulate the development of localized charge on the specimen surface. This effect is a hindrance to AES analysis because the potentials associated with the charge can either adversely affect the integrity of Auger data or make Auger data collection difficult (5, 6).

SDO ASTM: ASTM International
Document Number E983
Publication Date Nov. 1, 2010
Language en - English
Page Count 4
Revision Level 10
Supercedes
Committee E42.03
Publish Date Document Id Type View
April 1, 2019 E0983-19 Revision
Nov. 1, 2010 E0983-10 Revision
July 25, 2005 E0983-05 Revision
Nov. 1, 2018 E0983-10R18 Reaffirmation
Sept. 10, 1999 E0983-94R99 Reaffirmation