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ASTM E673-03

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Standard Terminology Relating to Surface Analysis (Withdrawn 2012)

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1.1 This terminology is related to the various disciplines involved in surface analysis.

1.2 The definitions listed apply to (a) Auger electron spectroscopy (AES), (b) X-ray photoelectron spectroscopy (XPS), (c) ion-scattering spectroscopy (ISS), (d) secondary ion mass spectrometry (SIMS), and (e) energetic ion analysis (EIA).


SDO ASTM: ASTM International
Document Number E673
Publication Date Dec. 1, 2003
Language en - English
Page Count 10
Revision Level 03
Supercedes
Committee E42.02
Publish Date Document Id Type View
Dec. 1, 2003 E0673-03 Revision
Dec. 10, 2002 E0673-02B Revision
Dec. 10, 2002 E0673-02A Revision
July 10, 2002 E0673-02 Revision
Nov. 10, 2001 E0673-98E01 Revision
Nov. 10, 2001 E0673-01 Revision