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ASTM E2246-11e1

Historical Revision

Standard Test Method for Strain Gradient Measurements of Thin, Reflecting Films Using an Optical Interferometer (Withdrawn 2023)

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1.1 This test method covers a procedure for measuring the strain gradient in thin, reflecting films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an optical interferometer, also called an interferometric microscope. Measurements from cantilevers that are touching the underlying layer are not accepted.

1.2 This test method uses a non-contact optical interferometric microscope with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


5.1 Strain gradient values are an aid in the design and fabrication of MEMS devices.

SDO ASTM: ASTM International
Document Number E2246
Publication Date Nov. 1, 2011
Language en - English
Page Count 21
Revision Level 11e1
Supercedes
Committee E08.05
Publish Date Document Id Type View
May 1, 2018 E2246-11R18 Revision
Nov. 1, 2011 E2246-11E01 Revision
Nov. 1, 2011 E2246-11 Revision
Nov. 1, 2005 E2246-05 Revision
Oct. 10, 2002 E2246-02 Revision