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ASTM E1634-02(2007)

Historical Reaffirmation

Standard Guide for Performing Sputter Crater Depth Measurements

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1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


Sputter crater depth measurements are performed in order to determine a sputter rate (depth/time) for each matrix sputtered during a sputter depth profile or similar in-depth type analyses. From sputter rate values, a linear depth scale can be calculated and displayed for the sputter depth profile.

Data obtained from surface profilometry are useful in monitoring instrumental parameters (for example, raster size, shape, and any irregularities in topography of the sputtered crater) used for depth profiles.

SDO ASTM: ASTM International
Document Number E1634
Publication Date June 1, 2007
Language en - English
Page Count 3
Revision Level 02(2007)
Supercedes
Committee E42.06
Publish Date Document Id Type View
Nov. 1, 2011 E1634-11 Revision
April 10, 2002 E1634-02 Revision
Nov. 1, 2019 E1634-11R19 Reaffirmation
June 1, 2007 E1634-02R07 Reaffirmation
April 10, 2002 E1634-94R99 Reaffirmation