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ASTM E1438-91(1996)

Historical Reaffirmation

Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

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1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


SDO ASTM: ASTM International
Document Number E1438
Publication Date Sept. 15, 1991
Language en - English
Page Count 2
Revision Level 91(1996)
Supercedes
Committee E42.06
Publish Date Document Id Type View
Nov. 1, 2011 E1438-11 Revision
Nov. 1, 2006 E1438-06 Revision
Nov. 1, 2019 E1438-11R19 Reaffirmation
Sept. 15, 1991 E1438-91R01 Reaffirmation
Sept. 15, 1991 E1438-91R96 Reaffirmation