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ASTM E1438-11

Current Revision

Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

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1.1 This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens. This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

1.2 This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.

This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


Although it would be desirable to measure the extent of profile distortion in any unknown sample by using a standard sample and this guide, measurements of interface width (profile distortion) can be unique to every sample composition (1, 2, 3).3 This guide, that describes a method that determines the unique width of a particular interface for the chosen set of operating conditions. It is primarily intended to provide a method for checking on proper or consistent, or both, instrument performance. Periodic analysis of the same sample followed by a measurement of the interface width, in accordance with this guide, will provide these checks.

The procedure described in this guide is adaptable to any layered sample with an interface between layers in which a nominated element is present in one layer and absent from the other. It has been shown that for SIMS in particular (4, 5) and for surface analysis in general (6, 7), only rigorous calibration methods can determine accurate interface widths. Such procedures are prohibitively time-consuming. Therefore the interface width measurement obtained using the procedure described in this guide may contain significant systematic error (8). Therefore, this measure of interface width may have no relation to similar measures made with other methods. However, this does not diminish its use as a check on proper or consistent instrument performance, or both.

SDO ASTM: ASTM International
Document Number E1438
Publication Date Nov. 1, 2011
Language en - English
Page Count 3
Revision Level 11
Supercedes
Committee E42.06
Publish Date Document Id Type View
Nov. 1, 2011 E1438-11 Revision
Nov. 1, 2006 E1438-06 Revision
Nov. 1, 2019 E1438-11R19 Reaffirmation
Sept. 15, 1991 E1438-91R01 Reaffirmation
Sept. 15, 1991 E1438-91R96 Reaffirmation