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ASTM D5544-94(1999)e1

Historical Revision

Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water

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1.1 This test method covers the determination of dissolved organic and inorganic matter and colloidal material found in high-purity water used in the semiconductor, aerospace, and other industries. This material is referred to as residue after evaporation (RAE). The range of the test method is from 0.1 [mu]g/L(ppb) to 20 mg/L (ppm).

1.2 This test method uses a continuous, real time monitoring technique to measure the concentration of RAE. A pressurized sample of high-purity water is supplied to the test method's apparatus continuously through ultra-clean fittings and tubing. Contaminants from the atmosphere are therefore prevented from entering the sample. General information on the test method and a literature review on the continuous measurement of RAE has been published.

1.3 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.


SDO ASTM: ASTM International
Document Number D5544
Publication Date June 10, 1999
Language en - English
Page Count 9
Revision Level 94(1999)e1
Supercedes
Committee D19.03
Publish Date Document Id Type View
June 1, 2016 D5544-16 Revision
May 1, 2011 D5544-11 Revision
Jan. 1, 2005 D5544-05 Revision
June 10, 1999 D5544-94R99E01 Revision
Nov. 1, 2023 D5544-16R23 Reaffirmation
Sept. 15, 1994 D5544-94R04 Reaffirmation